Nanocrystalline silicon/amorphous silicon dioxide superlattices

Materials Research Society Symposium - Proceedings

Volumn 485, Issue , 1998, Pages 49-59

  Fauchet, Phillippe M ^a   Tsybeskov, Leonid ^a   Zacharias, Margit ^a   Hirschman, Karl ^a  

^a UNIVERSITY OF ROCHESTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CHEMICAL VAPOR DEPOSITION; CRYSTALLIZATION; NANOSTRUCTURED MATERIALS; RAMAN SPECTROSCOPY; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; SILICA; SPUTTER DEPOSITION; TRANSMISSION ELECTRON MICROSCOPY; X RAY SPECTROSCOPY;

AMORPHOUS SILICON DIOXIDE; LUMINESCENCE SPECTROSCOPY; NANOCRYSTALLINE SILICON;

SUPERLATTICES;

EID: 0031629627     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (24)