Laser ultrasonic instrumentation for accurate temperature measurement of silicon wafers in Rapid Thermal Processing systems

Materials Research Society Symposium - Proceedings

Volumn 525, Issue , 1998, Pages 135-140

  Klimek, Dan ^a   Anthony, Brian ^a   Abbate, Agostino ^a   Kotidis, Petros ^a  

^a Textron Systems   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; LASER APPLICATIONS; TEMPERATURE MEASUREMENT; ULTRASONIC APPLICATIONS;

RAPID THERMAL PROCESSING (RTP);

SILICON WAFERS;

EID: 0031629499     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-525-135     Document Type: Conference Paper

References (9)