New method for extracting the capacitance coupling coefficients of sub-0.5-μm flash memory cells in the negative gate bias mode

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 1998, Pages 229-233

  Haraguchi, K ^a   Kume, H ^a   Ushiyama, M ^a   Ohkura, M ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; GATES (TRANSISTOR); SEMICONDUCTOR STORAGE;

CAPACITANCE COUPLING COEFFICIENTS; FLASH MEMORY CELLS;

NONVOLATILE STORAGE;

EID: 0031629471     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)