Detailed observation of small leak current in flash memories with thin tunnel oxides

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 1998, Pages 95-99

  Manabe, Yukiko ^a   Okuyama, Kousuke ^a   Kubota, Katsuhiko ^a   Nozoe, Atsushi ^a   Karashima, Tetsuji ^a   Ujiie, Kazuaki ^a   Kanno, Hiroyuki ^a   Nakashima, Moriyoshi ^a   Ajika, Natsuo ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENT MEASUREMENT; LEAKAGE CURRENTS; MOSFET DEVICES; THRESHOLD VOLTAGE;

FLASH MEMORY;

DATA STORAGE EQUIPMENT;

EID: 0031629466     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)