Integration of surface micromachined devices with optoelectronics: Technology and applications

LEOS Summer Topical Meeting

Volumn , Issue , 1998, Pages 3-4

  Warren, M E ^a   Blum, O ^a   Sullivan, C T ^a   Shul, R J ^a   Rodgers, M S ^a   Sniegowski, J J ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL POLISHING; MICROELECTRONIC PROCESSING; MICROMACHINING; OPTOELECTRONIC DEVICES; SEMICONDUCTING SILICON;

SURFACE MICROMACHINED DEVICES;

MICROELECTROMECHANICAL DEVICES;

EID: 0031629132     PISSN: 10994742     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)