ARC for sub-0.18 μm logic and Gigabit DRAM frontend and backend processes

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 1998, Pages 86-87

  Lee, Wei W ^a   He, Qizhi ^a   Chatterjee, Amitava ^a   Xing, Guoqiang ^a   Brennan, Ken ^a   Singh, Abha ^a   Zielinski, Eden ^a   Hanratt, Maureen ^a   Fang, Sunny ^a   Rogers, Daty ^a   Dixit, Girish ^a   Carter, Duane ^a   Luttmer, J D ^a   Havemann, Bob ^a   Chapman, Richard A ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIREFLECTION COATINGS; INTEGRATED CIRCUIT LAYOUT; MOSFET DEVICES; SEMICONDUCTING SILICON COMPOUNDS; SUBSTRATES;

FRONTEND AND BACKEND PROCESSES;

DYNAMIC RANDOM ACCESS STORAGE;

EID: 0031628678     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)