On the use of test structures for the electro-mechanical characterization of a CMOS compatible MEMS technology

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 1998, Pages 177-182

  Latorre, Laurent ^a   Bertrand, Yves ^a   Nouet, Pascal ^a  

^a UNIV MONTPELLIER   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DEVICE TESTING; SILICON SENSORS;

PIEZORESISTIVE FACTOR;

MICROELECTROMECHANICAL DEVICES;

EID: 0031627641     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)