Effects of internal stresses on the precision of moveable structures for optical MEMS

LEOS Summer Topical Meeting

Volumn , Issue , 1998, Pages 11-12

  Greek, Staffan ^a   Hjort, Klas ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; MATHEMATICAL MODELS; OPTICAL SYSTEMS; RESIDUAL STRESSES; STRESS ANALYSIS;

BIMORPH SYSTEMS; MOVEABLE STRUCTURES;

MICROELECTROMECHANICAL DEVICES;

EID: 0031625619     PISSN: 10994742     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)