RHEED monitoring of rotating samples during large-area homogeneous deposition of oxides

Materials Research Society Symposium - Proceedings

Volumn 502, Issue , 1998, Pages 249-254

  Matijasevic, V C ^a   Lu, Z ^a   Von Dessonneck, K ^a   Taylor, C ^a   Barlett, D ^a  

^a Conductus Inc ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; FILM GROWTH; HIGH TEMPERATURE SUPERCONDUCTORS; OXIDE SUPERCONDUCTORS; OXYGEN; PRESSURE EFFECTS; SUBSTRATES; SUPERCONDUCTING FILMS;

ROTATING SUBSTRATE; THIN FILM GROWTH;

REFLECTION HIGH ENERGY ELECTRON DIFFRACTION;

EID: 0031625236     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)