SCOPUS 정보 검색 플랫폼

Journal of Adhesion Science and Technology

Volumn 12, Issue 11, 1998, Pages 1219-1242

Cracking and loss of adhesion of Si3N4 and SiO2:P films deposited on Al substrates

(2) Scafidi, P a Ignat, M b

a STMICROELECTRONICS (Italy)

b CNRS (France)

Author keywords

Adhesion; Buckling; Cracking; Debonding; Fracture energy; Mechanical stability; Thin films

Indexed keywords

ADHESION; ALLOYING ELEMENTS; ALUMINUM; CRACK INITIATION; FILMS; PHOSPHORUS; SILICA; SUBSTRATES; BUCKLING; CRACKS; DEBONDING; FRACTURE ENERGY; MECHANICAL STABILITY; SCANNING ELECTRON MICROSCOPY; SILICON; SILICON COMPOUNDS; STRAIN; TENSILE TESTING; THIN FILMS;

DEBONDING;

SILICON NITRIDE; ADHESION;

AL SUBSTRATE; CRACK DENSITY; CRACK DEVELOPMENT; CRITICAL STRAINS; DEADHESION; INTERFACIAL FRACTURE ENERGY; INTERFACIAL STRENGTH; LONGITUDINAL STRAIN; MULTIPLE FILMS; SCANNING ELECTRON MICROSCOPE; TENSILE TESTS; THROUGH-THICKNESS CRACKING;

EID: 0031624290 PISSN: 01694243 EISSN: 15685616 Source Type: Journal
DOI: 10.1163/156856198X00407 Document Type: Article

Times cited : (33)

References (36)

1
- 0024766321
- W. D. Nix, Metall. Trans. 20A. 2217-2232 (1989)
- (1989) Metall. Trans , vol.20A , pp. 2217-2232
- Nix, W.D.¹

2
- 5244318650
- C. Li, P. Totta and P. Ho (Eds), AIP Conf. Proc, New York
- P. A. Flinn, in: Stress-induced Phenomena in Metallization, C. Li, P. Totta and P. Ho (Eds), AIP Conf. Proc., Vol. 263, pp. 73-79. New York (1992)
- (1992) Stress-Induced Phenomena in Metallization , vol.263 , pp. 73-79
- Flinn, P.A.¹

3
- 0024626558
- M. S. Hu and A. G. Evans, Acta Metall. 37, 917-925 (1989)
- (1989) Acta Metall , vol.37 , pp. 917-925
- Hu, M.S.¹ Evans, A.G.²

4
- 0026174060
- F. Delannay and P. Warren, Acta Metall. 39, 1061-1070 (1991)
- (1991) Acta Metall , vol.39 , pp. 1061-1070
- Delannay, F.¹ Warren, P.²

5
- 71149121504
- J. W. Hutchinson and Z. Suo, Adv. Appl. Mech. 29, 63-95 (1992)
- (1992) Adv. Appl. Mech , vol.29 , pp. 63-95
- Hutchinson, J.W.¹ Suo, Z.²

6
- 0027045651
- T. Ye, Z. Suo and A. G. Evans. Int. J. Solids Struct. 29, 2639 (1992)
- (1992) Int. J. Solids Struct , vol.29 , pp. 2639
- Ye, T.¹ Suo, Z.² Evans, A.G.³

7
- 0021093650
- G. Gillc and K. Wetzig, Thin Solid Films 110, 37-45 (1983)
- (1983) Thin Solid Films , vol.110 , pp. 37-45
- Gillc, G.¹ Wetzig, K.²

8
- 84987266075
- W. Weibull, J. Appl. Mech. 18, 293-297 (1951)
- (1951) J. Appl. Mech , vol.18 , pp. 293-297
- Weibull, W.¹

9
- 0024662599
- A. Mézin, J. Lepage, N. Pacia and D. Paulmier, Thin Solid Films 172, 197-215 (1989)
- (1989) Thin Solid Films , vol.172 , pp. 197-215
- Mézin, A.¹ Lepage, J.² Pacia, N.³ Paulmier, D.⁴

10
- 0024649447
- D. C. Agrawal and R. Raj. Acta Metall. 37, 1265-1279 (1989)
- (1989) Acta Metall , vol.37 , pp. 1265-1279
- Agrawal, D.C.¹ Raj, R.²

11
- 0016971873
- T. S. Chow, C. A. Liu and R. C. Penwell, J. Polym. Sci. 14, 1305-1312 (1976)
- (1976) J. Polym. Sci , vol.14 , pp. 1305-1312
- Chow, T.S.¹ Liu, C.A.² Penwell, R.C.³

12
- 36549092777
- F. Faupel, C. H. Yang, S. T. Chen and P. S. Ho, J. Appl. Phys. 65, 1911 (1989)
- (1989) J. Appl. Phys , vol.65 , pp. 1911
- Faupel, F.¹ Yang, C.H.² Chen, S.T.³ Ho, P.S.⁴

13
- 0026398284
- M. Ignat, A. Armann, L. Moberg and F. Sibieude, Surface Coatings Technol. 49. 514-521 (1991)
- (1991) Surface Coatings Technol , vol.49 , pp. 514-521
- Ignat, M.¹ Armann, A.² Moberg, L.³ Sibieude, F.⁴

14
- 0026946149
- M. Ignat, M. Ducarroir. M. Lelogeais and J. Garden, Thin Solid Films 220, 271-277 (1992)
- (1992) Thin Solid Films , vol.220 , pp. 271-277
- Ignat, M.¹ Ducarroir, M.² Lelogeais, M.³ Garden, J.⁴

15
- 11744289879
- M. Ignat, L. Fayette. F. Templier and J. Torres. Mater. Res. Soc. Symp. Proc. 264, 207-213 (1992)
- (1992) Mater. Res. Soc. Symp. Proc , vol.264 , pp. 207-213
- Ignat, M.¹ Fayette, L.² Templier, F.³ Torres, J.⁴

16
- 0027915052
- P. Scafidi and M. Ignat, Mater. Res. Soc. Symp. Proc. 309, 55-60 (1993)
- (1993) Mater. Res. Soc. Symp. Proc , vol.309 , pp. 55-60
- Scafidi, P.¹ Ignat, M.²

17
- 0028698550
- M. Ignat, P. Scafidi, E. Duloisy and J. Dijon. Mater. Res. Soc. Symp. Proc. 338, 135-146 (1994)
- (1994) Mater. Res. Soc. Symp. Proc , vol.338 , pp. 135-146
- Ignat, M.¹ Scafidi, P.² Duloisy, E.³ Dijon, J.⁴

18
- 0003955381
- Tome II. Gauthier-Villars
- J. Bénard, L.'Oxydation des Métaux. Tome II. Gauthier-Villars (1964)
- (1964) L.'Oxydation Des Métaux
- Bénard, J.¹

19
- 0008738519
- A. Chouaf, M. Ignat, P. Normandon and J. M. Terriez, Mater. Res. Soc. Symp. Proc. 203, 177-182 (1991)
- (1991) , vol.203 , pp. 177-182
- Chouaf, A.¹ Ignat, M.² Normandon, P.³ Terriez, J.M.⁴

20
- 11744367568
- M. Ignat, Key Eng. Mater. 279, 116-117 (1996)
- (1996) Key Eng. Mater , vol.279 , pp. 116-117
- Ignat, M.¹

21
- 11744362050
- M. Ignat, C. Josserond and L. Debove. Bull. SFME 14, 10-13 (1995)
- (1995) Bull. SFME , vol.14 , pp. 10-13
- Ignat, M.¹ Josserond, C.² Debove, L.³

22
- 0024734854
- E. Suhir, J. Appl. Mech. 56. 595-601 (1989)
- (1989) J. Appl. Mech , vol.56 , pp. 595-601
- Suhir, E.¹

23
- 85023976386
- Press, UK
- J. Aveston, G. A. Cooper and A. Kelly, The Properties of Fiber Composites. IPC Sci. Technol. Press, UK (1971)
- (1971) The Properties of Fiber Composites. IPC Sci. Technol
- Aveston, J.¹ Cooper, G.A.² Kelly, A.³

24
- 0000851347
- P. H. Wojciechowski and M. S. Mendolia, J. Vac. Sci. Technol. A7, 1282-1291 (1989)
- (1989) J. Vac. Sci. Technol , vol.A7 , pp. 1282-1291
- Wojciechowski, P.H.¹ Mendolia, M.S.²

25
- 0003946456
- University of California Berkeley Press, California
- A. Davutoglu and I. A. Aksay, in: Surfaces and Interfaces in Ceramic and Ceramic-Metal Systems, pp. 64-70. University of California Berkeley Press, California (1980)
- (1980) Surfaces and Interfacesin Ceramic and Ceramic-Metal Systems , pp. 64-70
- Davutoglu, A.¹ Aksay, I.A.²

26
- 0003513999
- 2nd edn. McGraw Hill, New York
- S. P. Timoshenko and J. M. Gere, Theory of Elastic Stability, 2nd edn. McGraw Hill, New York (1961)
- (1961) Theory of Elastic Stability
- Timoshenko, S.P.¹ Gere, J.M.²

27
- 0003702973
- Pcrgamon Press, Oxford
- M. F. Ashby and D. R. H. Jones, Engineering Materials. Vol. 1. Pcrgamon Press, Oxford (1980)
- (1980) Engineering Materials , vol.1
- Ashby, M.F.¹ Jones, D.R.H.²

28
- 84987335986
- G. R. Anstis, P. Chanttikul, B. R. Lawn and D. B. Marshall, J. Am. Ceramic. Soc. 64. 533 (1981)
- (1981) J. Am. Ceramic. Soc , vol.64 , pp. 533
- Anstis, G.R.¹ Chanttikul, P.² Lawn, B.R.³ Marshall, D.B.⁴

29
- 0002429638
- P. A. Flinn, Mater. Res. Soc. Symp. Proc. 130, 41-52 (1989)
- (1989) Mater. Res. Soc. Symp. Proc , vol.130 , pp. 41-52
- Flinn, P.A.¹

30
- 0001442570
- B. Bhushan, S. P. Murarka and J. Gerlach, J. Vac. Sci. Technol. B8, 1068-1075 (1990)
- (1990) J. Vac. Sci. Technol , vol.B8 , pp. 1068-1075
- Bhushan, B.¹ Murarka, S.P.² Gerlach, J.³

31
- 0021214703
- A. G. Evans and J. W. Hutchinson, Int. J. Solids Struct. 20, 455-465 (1984)
- (1984) Int. J. Solids Struct , vol.20 , pp. 455-465
- Evans, A.G.¹ Hutchinson, J.W.²

32
- 0343650775
- E. D. Hondros, Inst. Phys. Conf. Ser. 75, 121-128 (1986)
- (1986) Inst. Phys. Conf. Ser , vol.75 , pp. 121-128
- Hondros, E.D.¹

33
- 0024934204
- A. G. Evans, B. J. Dalgleish, M. He, and J. W. Hutchinson, Acta Metall. 37, 3249-3260 (1989)
- (1989) Acta Metall , vol.37 , pp. 3249-3260
- Evans, A.G.¹ Dalgleish, B.J.² He, M.³ Hutchinson, J.W.⁴

34
- 0025564127
- I. E. Reimanis, B. J. Dalgleish, M. Brahy, M. Rühle and A. G. Evans, Acta Metall. 38, 2645-2663 (1990)
- (1990) Acta Metall , vol.38 , pp. 2645-2663
- Reimanis, I.E.¹ Dalgleish, B.J.² Brahy, M.³ Rühle, M.⁴ Evans, A.G.⁵

35
- 0039350666
- R. F. Bunshah (Ed.), Noyce Publications, Park Ridge, NJ
- D. M. Mattox, in: Deposition Technology for Films and Coatings, R. F. Bunshah (Ed.), p. 63. Noyce Publications, Park Ridge, NJ (1982)
- (1982) Deposition Technology for Films and Coatings , pp. 63
- Mattox, D.M.¹

36
- 0026910573
- A. I. Sauter and W. D. Nix, IEEE Trans. CHMT 15, 594-603 (1992)
- (1992) IEEE Trans. CHMT , vol.15 , pp. 594-603
- Sauter, A.I.¹ Nix, W.D.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.