Statistical gate CD control including OPC

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 1998, Pages 170-171

  Misaka, Akio ^a   Goda, Akihiko ^a   Odanaka, Shinji ^a   Kobayashi, Satoshi ^a   Watanabe, Hisashi ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; GATES (TRANSISTOR); MASKS; PHOTOLITHOGRAPHY; STATISTICAL METHODS;

OPTICAL PROXIMITY CORRECTION (OPC); STATISTICAL GATE CRITICAL DIMENSION CONTROL;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0031623546     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)