New method for monitoring of analogue processes - evaluation of the impact of metalization on the performance of precise analogue resistors

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 1998, Pages 13-17

  Pergoot, A ^a   Cox, P ^a   Vercruysse, P ^a   Wuyts, I ^a   Raes, P ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPLICATION SPECIFIC INTEGRATED CIRCUITS; ELECTRIC NETWORK TOPOLOGY; ELECTRIC POTENTIAL; METALLIZING; POLYCRYSTALLINE MATERIALS; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DEVICE TESTING;

HIGH-OHMIC POLYCRYSTALLINE (HIPO) RESISTORS;

RESISTORS;

EID: 0031622330     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)