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Volumn 525, Issue , 1998, Pages 27-38
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Emissivity of coated silicon at elevated temperatures
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Author keywords
[No Author keywords available]
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Indexed keywords
COATED MATERIALS;
ELECTRON BEAMS;
HEATING;
LIGHT EMISSION;
LIGHT MEASUREMENT;
NITRIDES;
OPTICAL PROPERTIES;
OXIDES;
SEMICONDUCTOR DEVICE MODELS;
TEMPERATURE CONTROL;
TEMPERATURE MEASUREMENT;
THIN FILMS;
ISOTHERMAL ELECTRON BEAM HEATING;
RAPID THERMAL PROCESSING (RTP);
SILICON WAFERS;
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EID: 0031621393
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-525-27 Document Type: Conference Paper |
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Times cited : (2)
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References (51)
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