Formation of Cu3Si from Cu/a-Si multilayers

Materials Research Society Symposium - Proceedings

Volumn 481, Issue , 1998, Pages 581-586

  Chromik, R R ^a   Neils, W K ^a   Cotts, E J ^a  

^a BINGHAMTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; AMORPHOUS SILICON; ANNEALING; COPPER COMPOUNDS; DIFFERENTIAL SCANNING CALORIMETRY; GROWTH (MATERIALS); INTERDIFFUSION (SOLIDS); RATE CONSTANTS; SPUTTER DEPOSITION; STOICHIOMETRY; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS;

COPPER SILICIDE;

METALLIC SUPERLATTICES;

EID: 0031621390     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)