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Volumn , Issue , 1998, Pages 278-284
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Buffered HF at point of use
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Author keywords
[No Author keywords available]
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Indexed keywords
AMMONIUM COMPOUNDS;
CLEANING;
ETCHING;
SILICON WAFERS;
AMMONIUM HYDROXIDE;
BUFFERED HYDROFLUORIC ACID;
BUFFERED OXIDE ETCH;
HYDROFLUORIC ACID;
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EID: 0031620877
PISSN: 00739227
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (1)
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References (8)
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