Optimizing source location for control of thickness uniformity

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 1998, Pages 281-286

  Stevenson, I C ^a  

^a Denton Vacuum ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; EVAPORATION; MATHEMATICAL MODELS; SUBSTRATES; THICKNESS CONTROL;

SOURCE LOCATION; THICKNESS CONFORMITY;

COATINGS;

EID: 0031619185     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)