Tailored Si-layers on silicon oxide obtained by thermal CVD

Materials Research Society Symposium - Proceedings

Volumn 485, Issue , 1998, Pages 89-94

  Beaucarne, G ^a   Poortmans, J ^a   Caymax, M ^a   Nijs, J ^a   Mertens, R ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; GRAIN SIZE AND SHAPE; NUCLEATION; OXIDES; SEMICONDUCTING SILICON; SILICON SOLAR CELLS;

CRYSTALLINE SILICON; SILICON OXIDE;

FILM GROWTH;

EID: 0031617996     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)