Characterization of surface topography by SEM and SFM: Problems and solutions

Journal of Physics D: Applied Physics

Volumn 30, Issue 5, 1997, Pages 722-740

  Castle, J E ^a   Zhdan, P A ^a  

^a UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; ELECTRONS; SCANNING ELECTRON MICROSCOPY; SURFACES;

SCANNING FORCE MICROSCOPY; SURFACE SENSITIVITY; SURFACE TOPOGRAPHY;

SURFACE STRUCTURE;

EID: 0031557361     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/30/5/004     Document Type: Article

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