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Materials Science and Engineering B

Volumn 49, Issue 1, 1997, Pages 66-73

Microstructural study of Ti/Pt/Au contacts to p-InGaAs

(4) Ivey, D G a Ingrey, S b Noel, J P b Lau, W M c

a UNIVERSITY OF ALBERTA (Canada)

b NORTEL NETWORKS (Canada)

c UNIVERSITY OF WESTERN ONTARIO (Canada)

Author keywords

Hydrophobic etch; Microstructural; Transmission electron microscope

Indexed keywords

ANNEALING; DECOMPOSITION; GOLD; MICROSTRUCTURE; OHMIC CONTACTS; OZONE; PLATINUM; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM COMPOUNDS; THERMAL EFFECTS; TITANIUM; TRANSMISSION ELECTRON MICROSCOPY;

HYDROPHOBIC ETCH;

INTERFACES (MATERIALS);

EID: 0031554853 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5107(97)00114-1 Document Type: Article

Times cited : (14)

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