Using phthalocyanine precursors to prepare oxide thin films: decoupling the growth rate from the evaporation rate

Applied Physics Letters

Volumn 71, Issue 5, 1997, Pages 710-712

  Machler, E ^a   Arrouy, F ^a   Fritsch, E ^a   Bednorz, J G ^a   Berke, H ^a   Huber, J R ^a   Locquet, J P ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BEAM EPITAXY; CHEMICAL REACTIONS; CHEMICAL VAPOR DEPOSITION; EVAPORATION; FILM GROWTH; MOLECULES; OXIDE SUPERCONDUCTORS; SUBSTRATES; TEMPERATURE;

OXIDE THIN FILM; PHTHALOCYANINE;

SUPERCONDUCTING FILMS;

EID: 0031552849     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119837     Document Type: Article

References (13)