Imide-dimethylsiloxane block copolymers: Design and synthesis of a permanent buried oxygen ion etch barrier

Journal of Applied Polymer Science

Volumn 66, Issue 1, 1997, Pages 199-208

  Volksen, W ^a   Hedrick, L ^a   Russell, T P ^a   Swanson, S ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DUCTILITY; MOLECULAR WEIGHT; MORPHOLOGY; OLIGOMERS; PLASTIC FILMS; POLYESTERS; POLYIMIDES; PYROLYSIS; RING OPENING POLYMERIZATION; SILICONES; SYNTHESIS (CHEMICAL); THERMODYNAMIC STABILITY;

HOMOPOLYMERS;

BLOCK COPOLYMERS;

EID: 0031551524     PISSN: 00218995     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1097-4628(19971003)66:1<199::AID-APP23>3.0.CO;2-W     Document Type: Article

References (26)