Silicon cylinder grown on the surface of a silicon wafer

Journal of Crystal Growth

Volumn 182, Issue 3-4, 1997, Pages 337-340

  Zhang, Yafei ^a   Li, Gongchuan ^b   Lee, C S ^a   Lee, Shui Tong ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^b LANZHOU UNIVERSITY   (China)

Author keywords

Growth; Silicon; Single crystalline cylinder

Indexed keywords

CRYSTAL ORIENTATION; MOLTEN MATERIALS; RECRYSTALLIZATION (METALLURGY); SEMICONDUCTOR GROWTH; SUBSTRATES;

SINGLE CRYSTALLINE SILICON CYLINDER (SCSC);

SEMICONDUCTING SILICON;

EID: 0031550040     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(97)00368-0     Document Type: Article

References (3)

1. U. Neuwald, H.E. Hessel, A. Feltz, U. Memmert, R.J. Behm, Surf. Sci. Lett. 296 (1993) L8.
2. T.S. Ravi, R.B. Marcus, D. Liu, J. Vac. Sci. Technol. B 9 (6) (1991) 2733.
3. G.K. Mayer, H.L. Offereins, H. Sandmaier, K. Kuhl, J. Electrochem. Soc. 137 (1990) 3947.