Secondary ion emissions from fluorolubricants under several primary beam conditions by TOF-SIMS

Applied Surface Science

Volumn 121-122, Issue , 1997, Pages 146-151

  Hoshi, T ^a   Tozu, M ^a   Oiwa, R ^a   Zhanping, L ^a   Kudo, M ^b  

^a ULVAC PHI Inc   (Japan)

^b SEIKEI UNIVERSITY   (Japan)

Author keywords

Data reproducibility; Fluorolubricants; Primary beam; Thickness; TOF SIMS

Indexed keywords

FLUORINE COMPOUNDS; HARD DISK STORAGE; MAGNETIC TAPE; SECONDARY ION MASS SPECTROMETRY;

FLUOROLUBRICANTS; PRIMARY BEAM CONDITIONS;

LUBRICANTS;

EID: 0031549725     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)00275-4     Document Type: Article

References (5)

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2. T. Hoshi, M. Tozu, M. Kudo, in: Secondary Ion Mass Spectrometry, SIMS X, A. Benninghoven et al. (Eds.), John Wiley and Sons, p. 255.
3. W. J. van Ooji, R.H.G. Brinkhuis, in: Secondary Ion Mass Spectrometry, SIMS VI, A. Benninghoven et al. (Eds.), John Wiley and Sons, 1987, p. 449.
4. J.G. Newman, B.A. Carlson, R.S. Michael, J.F. Moulder, T.A. Hohlt, Static SIMS Handbook of Polymer Analysis Perkin-Elmer Corp., 1991.
5. J.G. Newman, K.V. Viswanathan, J. Vac. Sci. Technol. A 8 (1990) 2388.