Reactive sputtering and the use of anodes for optical coatings

Journal of Non-Crystalline Solids

Volumn 218, Issue , 1997, Pages 54-57

  Hill, Russell J ^a,b  

^a BOC Coating Technology   (United States)

^b BOC Coating Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; CERAMIC MATERIALS; CONDUCTIVE FILMS; ELECTRIC CURRENTS; MAGNETRON SPUTTERING;

CYLINDRICAL MAGNETRONS; REACTIVE SPUTTERING;

OPTICAL COATINGS;

EID: 0031549332     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(97)00132-4     Document Type: Article

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