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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 131, Issue 1-4, 1997, Pages 149-158

Ion irradiation induced chemical changes of polymers used for optical applications

(3) Rück, Dorothee M a Schulz, Joachim a Deusch, Norbert b

a GSI HELMHOLTZZENTRUM FÜR SCHWERIONENFORSCHUNG GMBH (Germany)

b Rohm GmbH (Germany)

Author keywords

BCB; Ion irradiation; Material decomposition by ion irradiation; Passive optical components; PMMA; PMMI

Indexed keywords

GUIDED ELECTROMAGNETIC WAVE PROPAGATION; INFRARED SPECTROSCOPY; ION BOMBARDMENT; MASS SPECTROMETRY; OPTICAL COMMUNICATION EQUIPMENT; OPTICAL DEVICES; PLASTICS APPLICATIONS; POLYIMIDES; POLYMETHYL METHACRYLATES; RADIATION EFFECTS; REFRACTIVE INDEX; TRANSPARENCY;

PASSIVE OPTICAL DEVICES; POLYMETHACRYLMETHYLIMIDE;

POLYMERS;

EID: 0031549158 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(97)00199-7 Document Type: Article

Times cited : (70)

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