The Legnaro ion microprobe in low current experiments

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 130, Issue 1-4, 1997, Pages 25-30

  Cervellera, F ^a   Donolato, C ^b   Egeni, G P ^a   Fortuna, G ^a   Nipoti, R ^b   Polesello, P ^c   Rossi, P ^d   Rudello, V ^a   Vittone, E ^c   Viviani, M ^a  

^a LABORATORI NAZIONALI DI LEGNARO   (Italy)

^b CNR   (Italy)

^c SEZIONE DI TORINO   (Italy)

^d SEZIONE DI PADOVA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMONDS; ELECTRIC CHARGE; GRAIN BOUNDARIES; ION BEAMS; LUMINESCENCE; POLYCRYSTALLINE MATERIALS; PROBES; SILICON SOLAR CELLS;

ION BEAM INDUCED CHARGE (IBIC); ION BEAM INDUCED LUMINESCENCE (IBIL); ION MICROPROBES;

NUCLEAR INSTRUMENTATION;

EID: 0031549054     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00200-0     Document Type: Article

References (16)

1. D. Bollini, F. Cervellera, G.P. Egeni, P. Mazzoldi, G. Moschini, P. Rossi, V. Rudello, Nucl. Instr. and Meth. A 328 (1993) 173.
2. P. Boccaccio, D. Bollini, D. Ceccato, G.P. Egeni, P. Rossi, V. Rudello and M. Viviani, Nucl. Instr. and Meth. B 109/110 (1996) 94.
3. M.B.H. Breese, P.J.C. King, G.W. Grime, F. Watt, J. Appl. Phys. 72 (1992) 2097.
4. M.B.H. Breese, P.J.C. King, G.W. Grime, P.R. Wilshaw, Appl. Phys. Lett. 62 (1993) 3309.
5. M.B. H Breese, C.H. Sow, D.N. Jamieson, F. Watt, Nucl. Instr. and Meth. B 85 (1994) 790.
6. M.B.H. Breese, A. Saint, F.W. Sexton, K.M. Horn, H. Schoene, B.L. Doyle, S. Laird, G.J.F. Legge, J. Appl. Phys. 77 (1995) 3734.
7. C. Donolato, R. Nipoti, D. Govoni, G.P. Egeni, V. Rudello and P. Rossi, Images of grain boundaries in polycrystalline silicon solar cells by electron and ion beam induced charge collection, 4th Int. Workshop BIADS'96, El Escorial, June 1996, Mater. Sci. Eng. B (1997), to be published.
8. C. Donolato, R. Nipoti, D. Govoni, G.P. Egeni, V. Rudello and P. Rossi, Images of grain boundaries in polycrystalline silicon solar cells by electron and ion beam induced charge collection, 4th Int. Workshop BIADS'96, El Escorial, June 1996, Mater. Sci. Eng. B (1997), to be published.
9. K.G. Malmqvist, Nucl. Instr. and Meth. B 104 (1995) 138.
10. J.E. Field, The Properties of Diamond (Academic Press, London, 1979).
11. C. Manfredotti, F. Fizzotti, K. Mirri, P. Polesello, M. Jaksic, S. Fasinic, I. Bogdanovic, V. Valkovic, T. Pochet, Diamond Relat. Mater., to be published.
12. C. Manfredotti, F. Fizzotti, P. Polesello, E. Vittone, M. Jaksic, I. Bogdanovic, V. Valkovic, in: XIV Conf. Application of Accelerators in Research and Industry, Denton, USA, Nov. 6-9 (1996).
13. C. Manfredotti, F. Fizzotti, P. Polesello, E. Vittone, F. Wang, Phys. Status Solidi (a) 154 (1996) 327.
14. A.A. Bettiol, D.N. Jamieson, S. Prawer, M.G. Allen, Nucl. Instr. and Meth. B 85 (1994) 775.
15. J.F. Ziegler, TRIM Instruction Manual (IBM-Research, 28-0 Yorktown, NY 10598, USA).
16. G.W. Grime and F. Watt, in: Principles and Applications of High Energy Ion Microbeams, eds. F. Watt and G.W. Grime (Adam Hilger, Bristol 1987), chap. 3.