Initial domain structure of GaAs thin films grown on Si(001) substrates

Applied Surface Science

Volumn 117-118, Issue , 1997, Pages 765-770

  Kawamura, Tomoaki ^a   Takenaka, Hisataka ^b   Hayashi, Takayoshi ^c   Tachikawa, Masami ^c   Mori, Hidefumi ^c  

^a Bio Medical Informatics Research Center   (Japan)

^b NTT Advanced Technology Corporation   (Japan)

^c NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL POLISHING; EPITAXIAL GROWTH; FILM GROWTH; PLASMA APPLICATIONS; SEMICONDUCTING FILMS; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR GROWTH; SILICON WAFERS; SUBSTRATES; SURFACE CLEANING; THIN FILMS; X RAY ANALYSIS;

MECHANOCHEMICAL POLISHING; PLASMA CLEANING; X RAY STANDING WAVE MEASUREMENTS;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0031548792     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)80179-1     Document Type: Article

References (15)

1. Heteroepitaxy on Silicon, NRS Symp. Proc: (a) Vol. 67, edited by J.C.C. Fan and J.M. Poate (1986); (b) Vol. 91, edited by J.C.C. Fan, J.M. Phillips and B.Y. Tsaur (1987); (c) Vol. 116, edited by H.K. Choi, R. Hull, H. Ishikawa and R.J. Nemanich (MRS, Pittsburgh, PA, 1988).
2. Heteroepitaxy on Silicon, NRS Symp. Proc: (a) Vol. 67, edited by J.C.C. Fan and J.M. Poate (1986); (b) Vol. 91, edited by J.C.C. Fan, J.M. Phillips and B.Y. Tsaur (1987); (c) Vol. 116, edited by H.K. Choi, R. Hull, H. Ishikawa and R.J. Nemanich (MRS, Pittsburgh, PA, 1988).
3. Heteroepitaxy on Silicon, NRS Symp. Proc: (a) Vol. 67, edited by J.C.C. Fan and J.M. Poate (1986); (b) Vol. 91, edited by J.C.C. Fan, J.M. Phillips and B.Y. Tsaur (1987); (c) Vol. 116, edited by H.K. Choi, R. Hull, H. Ishikawa and R.J. Nemanich (MRS, Pittsburgh, PA, 1988).
4. S.F. Fang, K. Adomi, S. Iyer, H. Morkoç, H. Zabel, C. Choi, N. Otsuka, J. Appl. Phys. 68 (1990) R31.
5. T. Kawamura, H. Takenaka, T. Hayashi, M. Tachikawa, H. Mori, Appl. Phys. Lett. 68 (1996) 1969.
6. R.M. Tromp, R.J. Harmers, J.E. Demuth, Phys. Rev. Lett. 59 (1987) 1691.
7. K. Fujita, Y. Shiba, T. Yamamoto, J. Cryst. Growth 99 (1990) 341.
8. D.A. Neuman, H. Zabel, R. Fischer, H. Morkoç, J. Appl. Phys. 61 (1987) 1023.
9. T. Kawamura, H. Takenaka, M. Uneta, M. Oshima, Y. Fukuda, Y. Ohmachi, K. Izumi, T. Ishikawa, S. Kikuta, Z.W. Zhang, Jpn. J. Appl. Phys. 32 (1993) 622.
10. S. Lagomarsino, F. Scarinci, C. Giannini, Phys. Rev. B 46 (1992) 13631.
11. E. Vlieg, A.E.M.J. Fischer, J.F. van der Veen, B.N. Dev, G. Materlik, Surf. Sci. 178 (1986) 36.
12. H. Mori, M. Ogasawara, M. Yamamoto, M. Tachikawa, Appl. Phys. Lett. 51 (1987) 1245.
13. M. Tachikawa, H. Mori, M. Sugo, Y. Itoh, Jpn. J. Appl. Phys. 32 (1993) L1252.
14. D.A. Neumann, H. Zabel, J. Appl. Phys. 61 (1987) 1023.
15. W. Stolz, F.E.G. Guuimaraes, K. Ploog, J. Appl. Phys. 63 (1988) 492.