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Volumn 234-236, Issue , 1997, Pages 1014-1015
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Small-angle neutron scattering in porous silicon
a b a a |
Author keywords
Nanoscale objects; Porosity; Semiconductors; Small angle neutron scattering
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Indexed keywords
ANNEALING;
DESORPTION;
DISSOLUTION;
ELECTROCHEMISTRY;
ETCHING;
HYDROGEN;
NANOSTRUCTURED MATERIALS;
NEUTRON SCATTERING;
POROSITY;
SEMICONDUCTOR DOPING;
SILICON WAFERS;
SINGLE CRYSTALS;
SMALL ANGLE NEUTRON SCATTERING (SANS);
POROUS SILICON;
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EID: 0031548230
PISSN: 09214526
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-4526(96)01246-X Document Type: Article |
Times cited : (2)
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References (4)
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