Mechanism for ion beam passivation of copper surfaces

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 742-746

  Kellock, A J ^a   Tabacniks, M H ^a,b   Baglin, J E E ^a   Somcio, N S ^a,c   Bardin, T T ^a,c   Miller, D C ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b UNIVERSITY OF SÃO PAULO   (Brazil)

^c SAN JOSE STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; DISSOCIATION; ION BEAMS; ION BOMBARDMENT; ION IMPLANTATION; OXIDATION RESISTANCE; PASSIVATION; RADIATION EFFECTS; SURFACE TREATMENT;

ION BEAM PASSIVATION;

COPPER;

EID: 0031547930     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)01169-X     Document Type: Article

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