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Volumn 127-128, Issue , 1997, Pages
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Proceedings of the 1996 10th International Conference on Ion Beam Modification of Materials
[No Author Info available]
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS ALLOYS;
ANNEALING;
DIAMOND FILMS;
GRAPHITE;
IMPLANTS (SURGICAL);
ION BOMBARDMENT;
ION IMPLANTATION;
SILICON CARBIDE;
SILICON NITRIDE;
SILICON WAFERS;
STAINLESS STEEL;
TITANIUM NITRIDE;
BURGERS VECTORS;
EIREV;
GETTERING;
HIGH ENERGY ION BOMBARDMENT;
HIGHLY ORIENTED PYROLYTIC GRAPHITE (HOPG);
ION BEAM MIXING;
ION FLUX;
RESIDUAL POINT DEFECTS;
SOLID PHASE EPITAXY (SPE);
VAN DER PAUW METHOD;
NUCLEAR PHYSICS;
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EID: 0031547795
PISSN: 0168583X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Review |
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Times cited : (3)
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References (0)
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