Microstructure and mechanical properties of IBAD niobium films on sapphire substrates

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 846-850

  Ji, Hong ^a   Was, Gary S ^a   Jones, J Wayne ^a   Moody, Neville R ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DUCTILITY; HARDENING; INTERFACES (MATERIALS); ION BOMBARDMENT; MICROSTRUCTURE; MORPHOLOGY; NIOBIUM; RESIDUAL STRESSES; SAPPHIRE; SUBSTRATES; SURFACE ROUGHNESS; VAPOR DEPOSITION;

INTERFACIAL FRACTURE ENERGY; ION BEAM ASSISTED DEPOSITION (IBAD) METHOD; PHYSICAL VAPOR DEPOSITION (PVD);

METALLIC FILMS;

EID: 0031547793     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00019-0     Document Type: Article

References (12)

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