SCOPUS 정보 검색 플랫폼

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 832-836

Influence of the process parameters on the growth of YSZ-layers prepared by ion beam assisted deposition (IBAD)

(9) Knierim, A a Auer, R a Geerk, J a Li, Y a Linker, G a Meyer, O a Reiner, J b Schweiss, P a Smithey, R a

a KARLSRUHE INSTITUTE OF TECHNOLOGY (Germany)

b ITP (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; ION BEAMS; ION BOMBARDMENT; MAGNETRON SPUTTERING; MULTILAYERS; SPUTTER DEPOSITION; SUBSTRATES; TEXTURES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; YTTRIUM COMPOUNDS;

INVERTED CYLINDRICAL MAGNETRON (ICM) GUN; ION BEAM ASSISTED DEPOSITION (IBAD) METHOD; YTTRIA-STABILIZED ZIRCONIA (YSZ);

ZIRCONIA;

EID: 0031547755 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(97)00016-5 Document Type: Article

Times cited : (9)

References (16)

1
- 30244481680
- D.K. Fork, D.B. Fenner, R.W. Barton, J.M. Philips, G.A.N. Cornel, J.B. Boyce and T.H. Geballe, Appl. Phys. Lett. 58 (1990) 116.
- (1990) Appl. Phys. Lett. , vol.58 , pp. 116
- Fork, D.K.¹ Fenner, D.B.² Barton, R.W.³ Philips, J.M.⁴ Cornel, G.A.N.⁵ Boyce, J.B.⁶ Geballe, T.H.⁷

2
- 0001522009
- X.D. Wu, R.E. Münchhausen, N.S. Nogar, A. Pique, R. Edwards, B. Wilkens, T.S. Ravi, D.M. Hwang and C.Y. Chen, Appl. Phys. Lett. 58 (1991) 304.
- (1991) Appl. Phys. Lett. , vol.58 , pp. 304
- Wu, X.D.¹ Münchhausen, R.E.² Nogar, N.S.³ Pique, A.⁴ Edwards, R.⁵ Wilkens, B.⁶ Ravi, T.S.⁷ Hwang, D.M.⁸ Chen, C.Y.⁹

3
- 0000807595
- R.P. Reade, X.L. Mao and R.E. Russo, Appl. Phys. Lett. 59 (1991) 739.
- (1991) Appl. Phys. Lett. , vol.59 , pp. 739
- Reade, R.P.¹ Mao, X.L.² Russo, R.E.³

4
- 36449000676
- E. Narumi, L.W. Song, F. Yang, S. Patel, Y.H. Kao and D.T. Shaw, Appl. Phys. Lett. 58 (1991) 1202.
- (1991) Appl. Phys. Lett. , vol.58 , pp. 1202
- Narumi, E.¹ Song, L.W.² Yang, F.³ Patel, S.⁴ Kao, Y.H.⁵ Shaw, D.T.⁶

5
- 21544475587
- Y. Iijima, N. Tanabe, O. Kohno and Y. Ikeno, Appl. Phys. Lett. 60 (1992) 769.
- (1992) Appl. Phys. Lett. , vol.60 , pp. 769
- Iijima, Y.¹ Tanabe, N.² Kohno, O.³ Ikeno, Y.⁴

6
- 36449000026
- X.D. Wu, S.R. Foltyn, P.N. Arendt, W.R. Blumenthal, I.H. Campbell, J.D. Cotton, J.Y. Coultier, W.L. Hults, M.P. Maley, H.F. Safar and J.L. Smith, Appl. Phys. Lett. 67 (1995) 2397.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 2397
- Wu, X.D.¹ Foltyn, S.R.² Arendt, P.N.³ Blumenthal, W.R.⁴ Campbell, I.H.⁵ Cotton, J.D.⁶ Coultier, J.Y.⁷ Hults, W.L.⁸ Maley, M.P.⁹ Safar, H.F.¹⁰ Smith, J.L.¹¹

7
- 84899096654
- submitted to
- A. Knierim, R. Auer, J. Geerk, G. Linker, O. Meyer, H. Reiner and R. Schneider, submitted to Appl. Phys. Lett.
- Appl. Phys. Lett.
- Knierim, A.¹ Auer, R.² Geerk, J.³ Linker, G.⁴ Meyer, O.⁵ Reiner, H.⁶ Schneider, R.⁷

8
- 0002114418
- C. Weißmantel, Thin Solid Films 32 (1976) 11.
- (1976) Thin Solid Films , vol.32 , pp. 11
- Weißmantel, C.¹

9
- 30244551915
- to be published
- A. Knierim, W. Ensinger, J. Geerk, G. Linker and O. Meyer, to be published.
- Knierim, A.¹ Ensinger, W.² Geerk, J.³ Linker, G.⁴ Meyer, O.⁵

10
- 0004111659
- Academic Press, New York
- D. Elwell and H.J. Scheel, Crystal Growth From High Temperature Solutions (Academic Press, New York, 1975).
- (1975) Crystal Growth From High Temperature Solutions
- Elwell, D.¹ Scheel, H.J.²

11
- 0027558946
- Y. Iijima, K. Onabe, N. Futaki, N. Tanabe, N. Sadakata, O. Kohno and Y. Ikeno, IEEE Trans. Appl. Supercond. 3 (1993) 1510.
- (1993) IEEE Trans. Appl. Supercond. , vol.3 , pp. 1510
- Iijima, Y.¹ Onabe, K.² Futaki, N.³ Tanabe, N.⁴ Sadakata, N.⁵ Kohno, O.⁶ Ikeno, Y.⁷

12
- 36449005973
- Y. Iijima, K. Onabe, N. Futaki, N. Sadakata and O. Kohno, J. Appl. Phys. 74 (1993) 1905.
- (1993) J. Appl. Phys. , vol.74 , pp. 1905
- Iijima, Y.¹ Onabe, K.² Futaki, N.³ Sadakata, N.⁴ Kohno, O.⁵

13
- 21544448393
- L.S. Yu, J.M.E. Harper, J.J. Cuomo and D.A. Smith, Appl. Phys. Lett. 47 (1985) 932.
- (1985) Appl. Phys. Lett. , vol.47 , pp. 932
- Yu, L.S.¹ Harper, J.M.E.² Cuomo, J.J.³ Smith, D.A.⁴

14
- 0003750648
- Academic Press, New York
- B.R. Appleton, G. Foti, Ion Beam Handbook for Material Analysis, (Academic Press, New York, 1977).
- (1977) Ion Beam Handbook for Material Analysis
- Appleton, B.R.¹ Foti, G.²

15
- 0001043330
- N. Sonnenberg, A.S. Longo, M.J. Cima, B.P. Chang, K.G. Ressler, P.C. McIntyre and Y.P. Liu, J. Appl. Phys. 74 (1993) 1027.
- (1993) J. Appl. Phys. , vol.74 , pp. 1027
- Sonnenberg, N.¹ Longo, A.S.² Cima, M.J.³ Chang, B.P.⁴ Ressler, K.G.⁵ McIntyre, P.C.⁶ Liu, Y.P.⁷

16
- 0018541456
- W.C. Marra, P. Eisenberger and A.Y. Cho, J. Appl. Phys. 50 (1979) 6927.
- (1979) J. Appl. Phys. , vol.50 , pp. 6927
- Marra, W.C.¹ Eisenberger, P.² Cho, A.Y.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.