Modification of semiconductor laser diodes by focused ion beam milling

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 428-432

  Musil, Christian R ^a   Patterson, Bruce D ^a   Auderset, Heinrich ^a  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ELECTROLUMINESCENCE; ION BEAMS; LASER MODES; LIGHT ABSORPTION; LIGHT MEASUREMENT; LIGHT PROPAGATION; SPUTTERING; WAVEGUIDES;

FOCUSED ION BEAM (FIB) MILLING; RIDGE WAVEGUIDES;

SEMICONDUCTOR LASERS;

EID: 0031547744     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00968-8     Document Type: Article

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