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Volumn 127-128, Issue , 1997, Pages 673-676

Ion beam assisted deposition of metallic and ceramic thin films

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM; AMORPHIZATION; CERAMIC MATERIALS; ION BOMBARDMENT; METALLIC FILMS; MOLYBDENUM; MORPHOLOGY; SURFACE ROUGHNESS; THIN FILMS; TITANIUM; ZIRCONIA;

EID: 0031547650     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)01153-6     Document Type: Article
Times cited : (9)

References (9)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.