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Volumn 127-128, Issue , 1997, Pages 673-676
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Ion beam assisted deposition of metallic and ceramic thin films
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINA;
ALUMINUM;
AMORPHIZATION;
CERAMIC MATERIALS;
ION BOMBARDMENT;
METALLIC FILMS;
MOLYBDENUM;
MORPHOLOGY;
SURFACE ROUGHNESS;
THIN FILMS;
TITANIUM;
ZIRCONIA;
ION BEAM ASSISTED DEPOSITION (IBAD);
SPUTTER DEPOSITION;
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EID: 0031547650
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0168-583X(96)01153-6 Document Type: Article |
Times cited : (9)
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References (9)
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