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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 507-511

Ion beam enhanced chemical etching of Nd: YAG for optical waveguides

(6) Nunn, P J T a Olivares, J a Spadoni, L a Townsend, P D a Hole, D E a Luff, B J b

a UNIVERSITY OF SUSSEX (United Kingdom)

b UNIVERSITY OF SOUTHAMPTON (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; ANNEALING; DISLOCATIONS (CRYSTALS); ETCHING; ION BEAMS; NEODYMIUM; OPTICAL WAVEGUIDES; POLISHING; SURFACE ROUGHNESS; YTTRIUM COMPOUNDS;

LASER CRYSTALS;

CRYSTALS;

EID: 0031547616 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(96)00980-9 Document Type: Article

Times cited : (17)

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