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Applied Surface Science

Volumn 113-114, Issue , 1997, Pages 556-561

Interfacial reactions of ultrahigh vacuum deposited Er-Si multilayer thin films

(2) Luo, C H a Chen, L J a

a NATIONAL TSING HUA UNIVERSITY (Taiwan)

Author keywords

Amorphous interlayer; Erbium silicide; Multilayer

Indexed keywords

AMORPHOUS ALLOYS; ANNEALING; CHEMICAL REACTIONS; COMPOSITION; ERBIUM COMPOUNDS; INTERFACES (MATERIALS); METALS; MULTILAYERS; STABILITY; TRANSMISSION ELECTRON MICROSCOPY;

ERBIUM SILICIDE; INTERFACIAL REACTIONS;

THIN FILMS;

EID: 0031547297 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(96)00800-8 Document Type: Article

Times cited : (4)

References (21)

1
- 21544462770
- K.N. Tu, R.D. Thompson and B.Y. Tsaur, Appl. Phys. Lett. 38 (1981) 626.
- (1981) Appl. Phys. Lett. , vol.38 , pp. 626
- Tu, K.N.¹ Thompson, R.D.² Tsaur, B.Y.³

2
- 30244518944
- H. Norde, J. deSousa Pires, F. d'Heurle, F. Pesavento, S. Petersson and P.A. Tove, Appl. Phys. Lett. 38 (1981) 865.
- (1981) Appl. Phys. Lett. , vol.38 , pp. 865
- Norde, H.¹ DeSousa Pires, J.² D'Heurle, F.³ Pesavento, F.⁴ Petersson, S.⁵ Tove, P.A.⁶

3
- 36749120001
- J.E. Baglin, F.M. d'Heurle and C.S. Petersson, Appl. Phys. Lett. 36 (1980) 594.
- (1980) Appl. Phys. Lett. , vol.36 , pp. 594
- Baglinn, J.E.¹ D'Heurle, F.M.² Petersson, C.S.³

4
- 0041595182
- F.H. Kaatz, W.R. Graham and J. van der Spiegel, Appl. Phys. Lett. 62 (1993) 1748.
- (1993) Appl. Phys. Lett. , vol.62 , pp. 1748
- Kaatz, F.H.¹ Graham, W.R.² Van Der Spiegel, J.³

5
- 3643147202
- U. Gosele and K.N. Tu, J. Appl. Phys. 66 (1989) 2619.
- (1989) J. Appl. Phys. , vol.66 , pp. 2619
- Gosele, U.¹ Tu, K.N.²

6
- 26544443963
- R.B. Schwarz and W.L. Johnson, Phys. Rev. Lett. 51 (1983) 415.
- (1983) Phys. Rev. Lett. , vol.51 , pp. 415
- Schwarz, R.B.¹ Johnson, W.L.²

7
- 30244479575
- unpublished
- C.H. Luo and L.J. Chen, unpublished
- Luo, C.H.¹ Chen, L.J.²

8
- 0012779414
- C.H. Luo, F.R. Chen and L.J. Chen, J. Appl. Phys. 76 (1994) 5744.
- (1994) J. Appl. Phys. , vol.76 , pp. 5744
- Luo, C.H.¹ Chen, F.R.² Chen, L.J.³

9
- 0016962984
- T.T. Sheng and C.C. Chang, IEEE Trans. Electron. Devices ED-23 (1976) 531.
- (1976) IEEE Trans. Electron. Devices , vol.ED-23 , pp. 531
- Sheng, T.T.¹ Chang, C.C.²

10
- 30244439390
- North-Holland, Amsterdam
- J.M. Cowley, Diffraction Physics, 2nd Rev. Ed. (North-Holland, Amsterdam, 1981).
- (1981) Diffraction Physics, 2nd Rev. Ed.
- Cowley, J.M.¹

11
- 0000331073
- F. Nava, T. Tien and K.N. Tu, J. Appl. Phys. 57 (1985) 2018.
- (1985) J. Appl. Phys. , vol.57 , pp. 2018
- Nava, F.¹ Tien, T.² Tu, K.N.³

12
- 0020951798
- T. Tien, G. Ottaviani and K.N. Tu, J. Appl. Phys. 54 (1983) 7047.
- (1983) J. Appl. Phys. , vol.54 , pp. 7047
- Tien, T.¹ Ottaviani, G.² Tu, K.N.³

13
- 0019004327
- A.R. Miedema, P.F. de Chatel and F.R. de Boer, Physica B 100 (1980) 1.
- (1980) Physica B , vol.100 , pp. 1
- Miedema, A.R.¹ De Chatel, P.F.² De Boer, F.R.³

14
- 0009115635
- K.F. Kelton and F. Spaepen, Phys. Rev. B 30 (1984) 5516.
- (1984) Phys. Rev. B , vol.30 , pp. 5516
- Kelton, K.F.¹ Spaepen, F.²

15
- 0004805658
- ed. B. Cantor The Metals Society, London
- U. Herold and U. Koster, in: Rapidly Quenched Metals III, Vol. 1, ed. B. Cantor (The Metals Society, London, 1978) p. 281.
- (1978) Rapidly Quenched Metals III , vol.1 , pp. 281
- Herold, U.¹ Koster, U.²

16
- 36449000253
- R. Pretorius, A.M. Vredenberg, F.W. Saris and R. de Reus, J. Appl. Phys. 70 (1991) 3636.
- (1991) J. Appl. Phys. , vol.70 , pp. 3636
- Pretorius, R.¹ Vredenberg, A.M.² Saris, F.W.³ De Reus, R.⁴

17
- 0025545755
- R. Pretorius, Vacuum 41 (1990) 1038.
- (1990) Vacuum , vol.41 , pp. 1038
- Pretorius, R.¹

18
- 0039749819
- M. Ronay, Appl. Phys. Lett. 42 (1983) 577.
- (1983) Appl. Phys. Lett. , vol.42 , pp. 577
- Ronay, M.¹

19
- 0027904433
- G.L.P. Berning, H.C. Swart and B. de Witt, Appl. Surf. Sci. 64 (1993) 1.
- (1993) Appl. Surf. Sci. , vol.64 , pp. 1
- Berning, G.L.P.¹ Swart, H.C.² De Witt, B.³

20
- 36449003561
- R. Busch, S. Schneider, A. Peker and W.L. Johnson, Appl. Phys. Lett. 67 (1995) 1544.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 1544
- Busch, R.¹ Schneider, S.² Peker, A.³ Johnson, W.L.⁴

21
- 21544449137
- S. Schneider, P. Thiyagarajan and W.L. Johnson, Appl. Phys. Lett. 68 (1996) 493.
- (1996) Appl. Phys. Lett. , vol.68 , pp. 493
- Schneider, S.¹ Thiyagarajan, P.² Johnson, W.L.³

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