Influence of MgO(1 0 0) substrate surfaces on epitaxial growth of Ti films

Journal of Crystal Growth

Volumn 173, Issue 1-2, 1997, Pages 109-116

  Harada, T ^a   Ohkoshi, H ^a,b  

^a KYOTO UNIVERSITY   (Japan)

^b LIXIL Corporation   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL POLISHING; CRYSTAL ORIENTATION; ELECTRON BEAMS; ELECTRON DIFFRACTION; EPITAXIAL GROWTH; FILM GROWTH; HIGH TEMPERATURE EFFECTS; MAGNESIA; SUBSTRATES; SURFACES; TITANIUM; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON BEAM HEATING METHOD; FACE CENTERED CUBIC (FCC) SPOTS;

METALLIC FILMS;

EID: 0031547014     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(96)00787-7     Document Type: Article

References (20)

1. E. Grünbaum, in: Epitaxial Growth, Ed. J.W. Matthew (Academic Press, New York, 1975) Part B, ch. 9, p. 611.
2. S. Ino, D. Watanabe and S. Ogawa, J. Phys. Soc. Japan 17 (1962) 1074.
3. Y. Chen, M.M. Abraham, T.J. Turner and C.M. Nelson, Phil. Mag. 32 (1975) 99.
4. M.A. Veledniskaya, Y.N. Rozhanskii, L.F. Comolova, G.V. Saparin, J. Schreiber and O. Brummer, Phys. Status Solidi (a) 32 (1975) 123.
5. S.J. Pennycook and L.M. Brown, J. Lumin. 18 & 19 (1975) 905.
6. G. Brusdeylins, R.B. Doak, J.G. Skofronick and J.P. Toennies, Surf. Sci. 128 (1983) 191.
7. F.E. Wawner and K.R. Lawless, J. Vac. Sci. Technol. 6 (1969) 588.
8. R. Pretorius, J.M. Harris and M.A. Nicolet, Solid-State Electron. 21 (1978) 667.
9. M.A. Taubenblatt and C.R. Helms, J. Appl. Phys. 53 (1982) 6308.
10. Y. Yamada, Jpn. J. Appl. Phys. 17 (1978) 617.
11. Y. Yamada and K. Yoshida, Surf. Sci. 86 (1979) 161.
12. Y. Yamada and K. Yoshida, Appl. Surf. Sci. 33 & 34 (1988) 465.
13. Y. Yamada, Jpn. J. Appl. Phys. 22 (1983) 29.
14. Y. Yamada, Y. Kasukabe and K. Yoshida, Jpn. J. Appl. Phys. 29 (1990) 70.
15. Y. Yamada, Y. Kasukabe, S. Nagata and S. Yamaguchi, Jpn. J. Appl. Phys. 29 (1990) L1888.
16. Y. Kasukabe and Y. Yamada, Jpn. J. Appl. Phys. 29 (1990) L1904.
17. S. Iida, Jpn. J. Appl. Phys. 29 (1990) L361.
18. T. Harada, M. Asano and Y. Mizutani, J. Crystal Growth 116 (1992) 243.
19. T. Awaji, K. Sakuta, Y. Sakaguchi and T. Kobayashi, Jpn. J. Appl. Phys. 31 (1992) L642.
20. C. Duriez, C. Chapon, C.R. Henry and J.M. Rickard, Surf. Sci. 230 (1990) 123.