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Volumn 173, Issue 1-2, 1997, Pages 201-209
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Numerical analysis of melt/solid interface shape in zone melting recrystallization process
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Author keywords
Finite element method; Heat transfer process; Melt solid interface; SOI; ZMR process
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Indexed keywords
FINITE ELEMENT METHOD;
FLOW OF FLUIDS;
HEAT CONDUCTION;
HEAT CONVECTION;
HEAT TRANSFER COEFFICIENTS;
MATHEMATICAL MODELS;
MOLTEN MATERIALS;
PHASE INTERFACES;
SILICA;
SILICON ON INSULATOR TECHNOLOGY;
SUBSTRATES;
ZONE MELTING;
ZONE MELTING RECRYSTALLIZATION;
SEMICONDUCTING SILICON;
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EID: 0031546832
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(96)00780-4 Document Type: Article |
Times cited : (12)
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References (24)
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