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Volumn 173, Issue 1-2, 1997, Pages 201-209

Numerical analysis of melt/solid interface shape in zone melting recrystallization process

Author keywords

Finite element method; Heat transfer process; Melt solid interface; SOI; ZMR process

Indexed keywords

FINITE ELEMENT METHOD; FLOW OF FLUIDS; HEAT CONDUCTION; HEAT CONVECTION; HEAT TRANSFER COEFFICIENTS; MATHEMATICAL MODELS; MOLTEN MATERIALS; PHASE INTERFACES; SILICA; SILICON ON INSULATOR TECHNOLOGY; SUBSTRATES; ZONE MELTING;

EID: 0031546832     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(96)00780-4     Document Type: Article
Times cited : (12)

References (24)
  • 1
    • 0040890868 scopus 로고
    • McGraw-Hill, New York, ch. 2
    • S.M. Sze, VLSI Technology (McGraw-Hill, New York, 1969) ch. 2, p. 85.
    • (1969) VLSI Technology , pp. 85
    • Sze, S.M.1
  • 2
    • 0040890870 scopus 로고
    • PhD Thesis, Seoul National University
    • I.G. Im, PhD Thesis, Seoul National University (1992).
    • (1992)
    • Im, I.G.1
  • 3
    • 0040296748 scopus 로고
    • PhD Thesis, KAIST
    • B.J. Yoon, PhD Thesis, KAIST (1993).
    • (1993)
    • Yoon, B.J.1
  • 4
    • 0040296749 scopus 로고
    • PhD Thesis, Katholieke Universiteit Leuven
    • P.W. Mertens, PhD Thesis, Katholieke Universiteit Leuven (1991).
    • (1991)
    • Mertens, P.W.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.