Oxidative etching of Ta-cluster-ion-bombarded highly-oriented pyrolytic graphite

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 122, Issue 3, 1997, Pages 343-346

  Reimann, C T ^a   Andersson, S ^a   Bruhwiler P A ^a   Martensson N ^a   Sundqvist, B U R ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CORRELATION METHODS; DEFECTS; ETCHING; ION BOMBARDMENT; OXIDATION; PYROLYSIS; SURFACES; TANTALUM;

AREAL PIT DENSITY; HIGHLY ORIENTED PYROLYTIC GRAPHITE; NUCLEATE OXIDATION ETCH PITS; OXIDATIVE ETCHING; TANTALUM CLUSTER ION BOMBARDMENT;

GRAPHITE;

EID: 0031546618     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00661-1     Document Type: Article

References (17)

1. G.R. Hennig, J. Chem. Phys. 40 (1964) 2877.
2. H. Chang and A.J. Bard, J. Am. Chem. Soc. 113 (1991) 5588.
3. T. Pakula, A. Tracz, G. Wegner and J.P. Rabe, J. Chem. Phys. 99 (1993) 8162.
4. P.L. Walker, Carbon 28 (1990) 261.
5. M.J. Nowakowski, J.M. Vohs and D.A. Bonnell, Surf. Sci. 271 (1992) L351.
6. L. Feng and J.D. Andrade, J. Biomater. Sci. Polymer Ed. 7 (1995) 439.
7. H. Yatzidis, Lancet 2 (1965) 216.
8. T. Li, B.V. King, R.J. MacDonald, G.F. Cotterill, D.J. O'Connor and Q. Yang, Surf. Sci. 312 (1994) 399.
9. M.W. Matthew, R.J. Beuhler, M. Ledbetter and L. Friedman, Nucl. Instr. and Meth. B 14 (1986) 448.
10. G. Bräuchle, S. Richard-Schneider, D. Illig, J. Rockenberger, R.D. Beck and M.M. Kappes, Appl. Phys. Lett. 67 (1995) 52.
11. C.T. Reimann, P.A. Sullivan, A. Türpitz, S. Altmann, A.P. Quist, A. Bergman, S.O. Oscarsson, B.U.R. Sundqvist and P. Håkansson, Surf. Sci. Lett. 341 (1995) L1019.
12. C.T. Reimann, S. Andersson, P.A. Brühwiler, L. Olsson, R. Erlandsson, N. Mårtensson and B.U.R. Sundqvist, in preparation.
13. R.T. Yang and C. Wong, J. Chem. Phys. 75 (1981) 4471.
14. P. Fayet, F. Patthey, H.-V. Roy, Th. Detzel and W.-D. Schneider, Surf. Sci. 269/270 (1992) 1101.
15. A. Tracz, G. Wegner and J.P. Rabe, Langmuir 9 (1993) 3033.
16. G. Bräuchle, PhD Thesis, University of Karlsruhe (1996).
17. Y. Yamamura and T. Muramoto, Phys. Rev. Lett. 69 (1992) 1463.