Tribological properties of titanium nitride films prepared by dynamic ion beam mixing method

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 121, Issue 1-4, 1997, Pages 279-282

  Nagasaka, Hiroshi ^a   Chayahara, Akiyoshi ^b   Fujii, Kanenaga ^b  

^a EBARA CORPORATION   (Japan)

^b OSAKA NATIONAL RESEARCH INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; FILMS; FRICTION; HARDNESS; ION BOMBARDMENT; NITROGEN; RADIATION EFFECTS; TRIBOLOGY; VAPOR DEPOSITION; WEAR RESISTANCE;

ION BEAM EFFECTS;

TITANIUM NITRIDE;

EID: 0031546259     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00593-9     Document Type: Article

References (11)

1. O.A. Johansen, J.H. Dontje and R.L.D. Zenner, Thin Solid Films 153 (1987) 75.
2. M. Satou and F. Fujimoto, J. Appl. Phys. 22 (1983) L171.1.
3. M. Satou, K. Matsuda and F. Fujimoto, Proc. 6th Symp. Ion Sources and Ion-Assisted Technology, Tokyo (1982) p. 425.
4. M. Kiuchi, K. Fujii, T. Tanaka, M. Satou and F. Fujimoto, Nucl. Instr. and Meth. B 33 (1988) 649.
5. S.A. Dillich, R.A. Kant, B.D. Sartwell, J.A. Sprague and F.A. Smidt, J. Tribology 113 (1991) 214.
6. H. Nagasaka, N. Tsuchiya, M. Kiuch, A. Chayahara, K. Fujii and M. Satou, Nucl. Instr. and Meth. B 80/81 (1993) 1380.
7. R. Evenson, R. Peterson and R. Hanson, Lubr. Eng. 50 (1) (1994) 37.
8. Joint Committee for Powder Diffraction Standards, Powder Diffraction File, Int. Center for Diffraction Data, Park Lane (1989).
9. J.C. Knight, T.F. Page and I.M. Hutchings, Surf. Eng. 5 (1989) 213.
10. P. Benjamin and C. Weaver, Proc. Roy. Soc. London, Ser. A 254 (1960) 163.
11. H.E. Hintermann, Wear 100 (1984) 381.