Metal contacts on shallow junctions

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 121, Issue 1-4, 1997, Pages 231-236

  Chen, L J ^a   Cheng, S L ^a   Tsui, B Y ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONTACTS; EPITAXIAL GROWTH; ION IMPLANTATION; IONS; NITROGEN; SEMICONDUCTOR JUNCTIONS; SILICON COMPOUNDS; STABILITY;

SHALLOW JUNCTIONS;

ULSI CIRCUITS;

EID: 0031546226     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00582-4     Document Type: Article

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