Molecular dynamics simulation for ionized cluster beam deposition

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 121, Issue 1-4, 1997, Pages 53-57

  Kang, Hee Jae ^a   Lee, Min Wha ^a   Kim, Jong Ho ^a   Whang, Chung Nam ^b  

^a Chungbuk National University   (South Korea)

^b Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DEFECTS; GOLD; ION BEAMS; IONS; MOLECULAR DYNAMICS; RADIATION EFFECTS; SUBSTRATES;

ION BEAM DEPOSITION;

DEPOSITION;

EID: 0031546219     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00559-9     Document Type: Article

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