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Volumn 121, Issue 1-4, 1997, Pages 419-421
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Formation of an ohmic electrode in SiC using a pulsed laser irradiation method
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Author keywords
[No Author keywords available]
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Indexed keywords
DOPING (ADDITIVES);
INTERFACES (MATERIALS);
LASER BEAM EFFECTS;
LASER PULSES;
NICKEL;
SILICON CARBIDE;
SUBSTRATES;
LASER DOPING;
ELECTRODES;
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EID: 0031546218
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0168-583X(96)00384-9 Document Type: Article |
Times cited : (11)
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References (7)
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