Pulsed laser deposition of silicon films for solar cell applications

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 121, Issue 1-4, 1997, Pages 367-370

  Hanabusa, Mitsugu ^a   Liu, Zhengxin ^a   Nakamura, Naoki ^b   Hasegawa, Hiroshi ^b  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b TOYOTA MOTOR CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALS; DEPOSITION; LASER BEAM EFFECTS; LASER PULSES; SEMICONDUCTOR JUNCTIONS; SILICON; THIN FILMS;

LASER DEPOSITION;

SOLAR CELLS;

EID: 0031546190     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00539-3     Document Type: Article

References (14)

1. C.M. Cotell and K.S. Grabowski, MRS Bull. XVII-2 (1992) 44.
2. D.B. Chrisey and A. Inam, MRS Bull. XVII-2 (1992) 37.
3. For instance, T. Sato, S. Furuno, S. Iguchi and M. Hanabusa, Appl. Phys. A 45 (1988) 355.
4. M. Hanabusa, M. Suzuki and S. Nishigaki, Appl. Phys. Lett. 38 (1981) 385.
5. M. Hanabusa and M. Suzuki, Appl. Phys. Lett. 39 (1981) 431.
6. M. Hanabusa, S. Moriyama and H. Kikuchi, Thin Solid Films 107 (1983) 227.
7. M. Hanabusa, Mat. Res. Soc. Symp. Proc. 285 (1993) 447.
8. B. Holzapfel, B. Roas, L. Schultz, P. Bauer and G. Saemann-Ischenko, Appl. Phys. Lett. 61 (1992) 3178.
9. E.V. Pechen, A.V. Varlashkin, S.I. Krasnosvobodtsev, B. Brunner and K.F. Renk, Appl. Phys. Lett. 66 (1995) 2292.
10. M. Hanabusa and K. Tsujihara, J. Appl. Phys. 78 (1995) 4267.
11. G. Koren, A. Gupta, R.J. Baseman, M.I. Lutwyche and R.B. Laibowitz, Appl. Phys. Lett. 55 (1989) 2450.
12. Y. Hamakawa, in: Solar Energy Engineering, eds. Y. Hamakawa and Y. Kuwano (Baifukan, Tokyo, 1994) Chap. 2, pp. 13-44.
13. H. Matsunami, in: Solar Energy Engineering, eds. Y. Hamakawa and Y. Kuwano (Baifukan, Tokyo, 1994) Chap. 4.1, pp. 63-95.
14. T. Sakamoto: in Molecular beam Epitaxial Technology, ed. K. Takahashi (Kogyo Chousakai, Tokyo, 1984) Chap. 5, pp. 127-150.