Review of Ion Engineering Center and related projects in Ion Engineering Research Institute

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 121, Issue 1-4, 1997, Pages 1-6

  Inoue, Morio ^a   Suzuki, Yasuo ^a   Takagi, Toshinori ^a  

^a Ion Engineering Research Institute   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CORROSION RESISTANCE; ION BOMBARDMENT; ION IMPLANTATION; RESEARCH AND DEVELOPMENT MANAGEMENT; SURFACE TREATMENT; WEAR RESISTANCE;

ION ENGINEERING;

ION BEAMS;

EID: 0031546187     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00431-4     Document Type: Review

References (9)

1. T. Takagi, Trans, Mat. Res. Soc. Japan. 17 (1993) 135.
2. S. Otani et al., Proc. Joint Int. Symp. '96 MRS-J Conf. and 3rd Ion Eng. Conf. May 23-24 (1996) Symp. N, Nucl. Instr. and Meth. B 121 (1997) 319.
3. S. Otani et al., Proc. Joint Int. Symp. '96 MRS-J Conf. and 3rd Ion Eng. Conf. May 23-24 (1996) Symp. N, Nucl. Instr. and Meth. B 121 (1997) 319.
4. Y. Matsumoto et al., to be published.
5. S. Ohtani and N. Iwamoto, Int. Conf. Surf. Mod. Mat. by Ion Beams, Spain, 1995.
6. T. Kimoto et al., 6th Int. Conf. Silicon Carbide and Related Materials, Kyoto (1995).
7. J. Takada, Japan. J. Appl. Phys. 34 (1995) 158.
8. M. Bruel, Electron. Lett. 31 (1995) 1201.
9. T. Hara et al., J. Electrochem. Soc. 143 (1996) 168.