Safety interlock and remote computer monitoring for a diffusion-pumped vacuum system

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 1, 1997, Pages 201-205

  Chu, Liang T ^a  

^a STATE UNIVERSITY OF NEW YORK   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031543053     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580467     Document Type: Article

References (8)

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3. P. Vijendran and R. J. Patel, Indian J. Tech. 9, 401 (1972).
4. R. Seedorf, Vakuum Tech. 37, 78 (1988).
5. Y. Satow, K. Ito, and T. Kosuge, Rev. Sci. Instrum. 60, 1961 (1989).
6. N. Kanaya, S. Sakanaka, S. Sato, T. Koide, and S. Asaoka, IEEE Trans. Nucl. Sci. 37, 2 (1990).
7. For example, Balzers TCS-1001. List price for the base unit is $3880.
8. L. T. Chu, M.-T. Leu, and L. F. Keyser, J. Phys. Chem. 97, 7779 (1993).