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Volumn 6, Issue 1, 1997, Pages 4-9
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Measuring the aerial image with an atomic force microscope
a
a
IBM
(United States)
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Author keywords
[No Author keywords available]
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Indexed keywords
ABERRATIONS;
ABSORPTION;
ATOMIC FORCE MICROSCOPY;
IMAGING TECHNIQUES;
LENSES;
MEASUREMENTS;
MICROSCOPES;
PHOTORESISTS;
AERIAL IMAGE;
IMAGE MEASUREMENT;
PHOTOLITHOGRAPHY;
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EID: 0031542674
PISSN: 1074407X
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Article |
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Times cited : (1)
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References (6)
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