Experimental investigation of the matching and impressed electric field of a multipolar electron cyclotron resonance discharge

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 1, 1997, Pages 154-168

  Mak, P ^a   Asmussen, J ^a  

^a Michigan State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031538116     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580458     Document Type: Article

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