A new method of determining strength and fracture toughness of thin films;Eine neue methode zur festigkeits- und zähigkeitsbestimmung von dünnen schichten

Materialwissenschaft und Werkstofftechnik

Volumn 28, Issue 3, 1997, Pages 124-130

  Jaeger, Gert ^a   Heilmaier, Martin ^a   Schaper, Michael ^b  

^a IFW DRESDEN   (Germany)

^b DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031526341     PISSN: 09335137     EISSN: None     Source Type: Journal    
DOI: 10.1002/mawe.19970280311     Document Type: Article

References (15)

1. F. R. Brotzen: Mechanical testing of thin films. Int. Mater. Rev. 39 (1994) 24-44.
2. D. A. Hardwick: The Mechanical Properties of Thin Films: A Review. Thin Solid Films 154 (1987) 109-124.
3. A. J. Griffin, Jr., F. R. Brotzen, C. F. Dunn: Mechanical testing of thin metallic films. Thin Solid Films 220 (1992) 265-270.
4. J. L. Gossett: New Height Measurement Method for Bulge Testing. In: 'Properties of electrodeposits', (ed. R. Sard et al.), 221-228; 1975, Princeton, NJ, The Electrochemical Society.
5. M. K. Small, J. J. Vlassak, W. D. Nix: in Thin Films: Stresses and mechanical properties III', (ed. W. D. Nix et al.), MRS Symp. Proc. 239 (1992) 257-262.
6. T. P. Weihs, S. Hong, J. C. Bravman, W. D. Nix: Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films. J. Mater. Res. 3 (1988) 931-942.
7. J.-Å. Schweitz: Mechanical Characterization of Thin Films by Micromechanical Techniques. MRS Bull. 17 (1992) 34-45.
8. R. F. Cook, G. M. Pharr: Direct Observation and Analysis of Identation Cracking in Glasses and Ceramics. J. Am. Ceram. Soc. 73 [4] (1990) 787-817.
9. G. M. Pharr, D. S. Harding, W. C. Oliver: Measurement of Fracture Toughness in Thin Films and Small Volumes using Nanoindentation Methods. In: Proc. NATO Advanced Study Institute on 'Mechanical Properties and Deformation Behavior of Materials Having Ultra-Fine Microstructures', Praia do Porto Novo. Portugal, July 1992, (ed. M. Nastasi el al.), 449-461.
10. K. Zeng, K. Breder, D. J. Rowcliffe: The Herzian Stress Field and Formation of Cone Cracks-II. Determination of Fracture Toughness. Acta Metall. Mater. 40 (1992) 2601-2605.
11. G. Gille, K. Wetzig: Investigations on mechanical behaviour of brittle wear-resistant coatings, I. Experimental results. Thin Solid Films 110 (1983) 37-54.
12. F. Schlät, M. Schaper: The Resonance Vibration Compliance Technique. Proc. 9th Congress on Materials Testing, Budapest, (1986), Vol. 1, 109-113.
13. A. Leonhardt, K. Bartsch, J. Endler: Preparation and characterisation of hard mono- and multilayer plasma-assisted chemically vapour deposited coatings. Surf. Coat.Technol. 76-77 (1995) 225-230.
14. F. Binder: Refraktäre metallische Hartstoffe. Radex-Rundschau 4 (1975) 531-557.
15. 2 on sinterability and mechanical properties of Titanium Nitride, Titanium Carbonitride and Titanium Diboride. Mat. Trans. JIM 37/4 (1996) 782-787.