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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 4, 1997, Pages 2238-2246

Generation of intense, hexapole-selected, supersonic beams of fluorocarbon radicals: CF, CF2, and CF3

(3) Weibel, Michael A a Hain, Toby D a Curtiss, Thomas J a

a UNIVERSITY OF UTAH (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031521787 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.580540 Document Type: Article

Times cited : (9)

References (57)

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